Chinese Journal of Catalysis

Chinese Journal of Catalysis ›› 2006, Vol. 27 ›› Issue (6): 465-467.

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Catalyst-Enhanced Chemical Vapor Deposition of Palladium-Platinum Bilayer Films on Polyimide

ZHENG Jianhua1, ZHOU Jinlan2, YU Kaichao2, GE Xuegui1, YU Shuyan3   

  1. 1 Department of Material Science and Chemical Engineering, China University of Geosciences, Wuhan 430074, Hubei, China; 2 Department of Chemistry, Huazhong University of Science and Technology, Wuhan 430074, Hubei, China; 3 State Key Laboratory of Polymer Physics and Chemistry, Institute of Chemistry, The Chinese Academy of Sciences, Beijing 100080, China
  • Received:2006-06-25 Online:2006-06-25 Published:2010-08-28

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Abstract: Catalyst-enhanced chemical vapor deposition of Pt and Pd-Pt bilayer films on polyimide using N2 and O2 as the carrier gases was studied. When the mixture of Pt complex and Pd complex was used as precursors in the same chamber for co-deposition of Pd and Pt, only Pt was deposited. Sequential deposition of Pd and Pt metals formed Pd-Pt bilayer films.

Key words: catalyst-enhanced chemical vapor deposition, polyimide, platinum film, palladium-platinum bilayer film