Chinese Journal of Catalysis ›› 2019, Vol. 40 ›› Issue (9): 1311-1323.DOI: 10.1016/S1872-2067(19)63321-8

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Atomic layer deposition: Catalytic preparation and modification technique for the next generation

Hongbo Zhanga, Christopher L. Marshallb   

  1. a School of Materials Science and Engineering & National Institute for Advanced Materials, Nankai University, Tianjin 300350, China;
    b Chemical Sciences and Engineering Division, Argonne National Laboratory, 9700 South Cass Avenue, Lemont, IL, 60439, USA
  • Received:2019-01-05 Online:2019-09-18 Published:2019-07-06
  • Contact: S1872-2067(19)63321-8
  • Supported by:
    This paper is dedicated to the 100th anniversary of Nankai University, which was founded in 1919 by educators Mr. Xiu Yan and Mr. Boling Zhang.

Abstract: Atomic layer deposition (ALD) attracts great attention nowadays due to its ability for designing and modifying catalytic systems at the molecular level. There are several reported review papers published recently discussing this technique in catalysis. However, the mechanism on how the deposited materials improve the catalyst stability and tune the reaction selectivity is still unclear. Herein, catalytic systems created via ALD on stepwise preparation and/or modification under self-limiting reaction conditions are summarized. The effects of deposited materials in terms of electronic/geometry modification over the catalytic nanoparticles (NPs) are discussed. These effects explain the mechanism of the catalytic stability improvement and the selectivity modification. The unique properties of ALD for designing new catalytic systems are further investigated for building up photocatalytic reaction nanobowls, tandem catalyst and bi-active-component metallic catalytic systems.

Key words: Atomic layer deposition, Catalyst modification, Catalyst preparation, Redox properties, Terrace site, Step site