Application of atomic layer deposition in fabricating high-efficiency electrocatalysts

doi:10.1016/S1872-2067(19)63440-6

Abstract

Abstract: Electrocatalysis is a promising approach to clean energy conversion due to its high efficiency and low environmental pollution. Noble metal materials have been studied to show high activity toward electrocatalyltic reactions, although such applications remain restricted by the high cost and poor durability of the noble metals. By precisely adjusting the catalyst composition, size, and structure, electrocatalysts with excellent performance can be obtained. Atomic layer deposition (ALD) is a technique used to produce ultrathin films and ultrafine nanoparticles at the atomic level. It possesses unique advantages for the controllable design and synthesis of electrocatalysts. Furthermore, the homogenous composition and structure of the electrocatalysts prepared by ALD favor the exploration of structure-reactivity relationships and catalytic mechanisms. In this review, the mechanism, characteristics, and advantages of ALD in fabricating nanostructures are introduced first. Subsequently, the problems associated with existing electrocatalysts and a series of recently developed ALD strategies to enhance the activity and durability of electrocatalysts are presented. For example, the deposition of ultrafine Pt nanoparticles to increase the utilization and activity of Pt, fabrication of core-shell, overcoat, nanotrap, and other novel structures to protect the noble-metal nanoparticles and enhance the catalyst stability. In addition, ALD developments in synthesizing non-noble metallic electrocatalysts are summarized and discussed. Finally, based on the current studies, an outlook for the ALD application in the design and synthesis of electrocatalysts is presented.

Key words: Atomic layer deposition, Electrocatalysis, Pt, Catalyst stability, Metal-support interaction

Huimin Yang, Yao Chen, Yong Qin. Application of atomic layer deposition in fabricating high-efficiency electrocatalysts[J]. Chinese Journal of Catalysis, 2020, 41(2): 227-241.

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URL: https://www.cjcatal.com/EN/10.1016/S1872-2067(19)63440-6

https://www.cjcatal.com/EN/Y2020/V41/I2/227

References

[1] J. A. Turner, Science, 2004, 305, 972-974.
[2] S. Chu, A. Majumdar, Nature, 2012, 488, 294-303.
[3] T. Reier, M. Oezaslan, P. Strasser, ACS Catal., 2012, 2, 1765-1772.
[4] Z. W. Seh, J. Kibsgaard, C. F. Dickens, I. Chorkendorff, J. K. Nørskov, T. F. Jaramillo, Science, 2017, 355, eaad4998.
[5] Y. Nie, L. Li, Z. Wei, Chem. Soc. Rev., 2015, 44, 2168-2201.
[6] I. Ganesh, Renew. Sustain. Energy Rev., 2016, 59, 1269-1297.
[7] F. J. Vidal-Iglesias, N. Garcia-Araez, V. Montiel, J. M. Feliu, A. Aldaz, Electrochem. Commun., 2003, 5, 22-26.
[8] H. Liu, C. Song, L. Zhang, J. Zhang, H. Wang, D. P. Wilkinson, J. Power Sources, 2006, 155, 95-110.
[9] W. J. Zhou, Z. H. Zhou, S. Q. Song, W. Z. Li, W. Li, G. Q. Sun, P. Tsiakaras, Q. Xin, Appl. Catal. B:Environ., 2003, 46, 273-285.
[10] C. Rice, S. Ha, R. I. Masel, A. Wieckowski, J. Power Sources, 2003, 115, 229-235.
[11] L. Zhang, L. Han, H. Liu, X. Liu, J. Luo, Angew. Chem. Int. Ed., 2017, 56, 13694-13698.
[12] E. J. Yoo, T. Okata, T. Akita, M. Kohyama, J. Nakamura, I. Honma, Nano Lett., 2009, 9, 2255-2259.
[13] J. X. Wang, H. Inada, L. J. Wu, Y. M. Zhu, Y. M. Choi, P. Liu, W. P. Zhou, R. R. Adzic, J. Am. Chem. Soc., 2009, 131, 17298-17302.
[14] N. Cheng, M. Norouzi Banis, J. Liu, A. Riese, S. Mu, R. Li, T. K. Sham, X. Sun, Energy Environ. Sci., 2015, 8, 1450-1455.
[15] X. Cheng, Y. Li, L. Zheng, Y. Yan, Y. Zhang, G. Chen, S. Sun, J. Zhang, Energy Environ. Sci., 2017, 10, 2450-2458.
[16] H. Lv, S. Mu, N. Cheng, M. Pan, Appl. Catal. B:Environ., 2010, 100, 190-196.
[17] S. Yin, S. Mu, H. Lv, N. Cheng, M. Pan, Z. Fu, Appl. Catal. B:Environ., 2010, 93, 233-240.
[18] N. Cheng, S. Stambula, D. Wang, M. N. Banis, J. Liu, A. Riese, B. Xiao, R. Li, T. K. Sham, L. M. Liu, G. A. Botton, X. Sun, Nat. Commun., 2016, 7, 13638.
[19] C. Wang, F. Hu, H. Yang, Y. Zhang, H. Lu, Q. Wang, Nano Res., 2017, 10, 238-246.
[20] Y. Chen, S. Ji, Y. Wang, J. Dong, W. Chen, Z. Li, R. Shen, L. Zheng, Z. Zhuang, D. Wang, Y. Li, Angew. Chem. Int. Ed., 2017, 56, 6937-6941.
[21] M. C. Tsai, T. T. Nguyen, N. G. Akalework, C. J. Pan, J Rick, Y. F. Liao, W. N. Su, B. J. Hwang, ACS Catal., 2016, 6, 6551-6559.
[22] X. Han, F. Cheng, T. Zhang, J. Yang, Y. Hu, J. Chen, Adv. Mater., 2014, 26, 2047-2051.
[23] C. Meng, T. Ling, T. Y. Ma, H. Wang, Z. Hu, Y. Zhou, J. Mao, X. W. Du, M. Jaroniec, S. Z. Qiao, Adv. Mater., 2017, 29, 1604607.
[24] N. Cheng, M. N. Banis, J. Liu, A. Riese, X. Li, R. Li, S. Ye, S. Knights, X. Sun, Adv. Mater., 2015, 27, 277-281.
[25] J. Lu, P. C. Stair, Langmuir, 2010, 26, 16486-16495.
[26] V. R. Anderson, N. Leick, J. W. Clancey, K. E. Hurst, K. M. Jones, A. C. Dillon, S. M. George, J. Phys. Chem. C, 2014, 118, 8960-8970.
[27] M. Knez, K. Nielsch, L. Niinistö, Adv. Mater., 2007, 19, 3425-3438.
[28] T. Aaltonen, M. Ritala, T. Sajavaara, J. Keinonen, M. Leskelä, Chem. Mater., 2003, 15, 1924-1928.
[29] C. T. Hsieh, D. Y. Tzou, M. T. Jiang, J. Electroanal. Chem., 2017, 794, 139-147.
[30] J. L. Lu, J. W. Elam, P. C. Stair, Acc. Chem. Res., 2013, 46, 1806-1815.
[31] S. Sun, G. Zhang, N. Gauquelin, N. Chen, J. Zhou, S. Yang, W. Chen, X. Meng, D. Geng, M. N. Banis, R. Li, S. Ye, S. Knights, G. A. Botton, T. K. Sham, X. Sun, Sci. Rep., 2013, 3, 1775.
[32] E. Rikkinen, A. Santasalo-Aarnio, S. Airaksinen, M. Borghei, V. Viitanen, J. Sainio, E. I. Kauppinen, T. Kallio, A. O. I. Krause, J. Phys. Chem. C, 2011, 115, 23067-23073.
[33] C. T. Hsieh, Y. Y. Liu, D. Y. Tzou, Y. C. Chen, J. Taiwan Inst. Chem. Eng., 2014, 45, 186-191.
[34] X. Jiang, T. M. Gür, F. B. Prinz, S. F. Bent, Chem. Mater., 2010, 22, 3024-3032.
[35] W. Setthapun, W. D. Williams, S. M. Kim, H. Feng, J. W. Elam, F. A. Rabuffetti, K. R. Poeppelmeier, P. C. Stair, E. A. Stach, F. H. Ribeiro, J. T. Miller, C. L. Marshall, J. Phys. Chem. C, 2010, 114, 9758-9771.
[36] T. D. Gould, A. M. Lubers, A. R. Corpuz, A. W. Weimer, J. L. Falconer, J. W. Medlin, ACS Catal., 2015, 5, 1344-1352.
[37] C. Y. Su, Y. C. Hsueh, C. C. Kei, C. T. Lin, T. P. Perng, J. Phys. Chem. C, 2013, 117, 11610-11618.
[38] C. K. Poh, S. H. Lim, H. Pan, J. Lin, J. Y. Lee, J. Power Sources, 2008, 176, 70-75.
[39] Y. C. Hsueh, C. C. Wang, C. C. Kei, Y. H. Lin, C. Liu, T. P. Perng, J. Catal., 2012, 294, 63-68.
[40] C. T. Hsieh, W. Y. Chen, D. Y. Tzou, A. K. Roy, H. T. Hsiao, Int. J. Hydrogen Energy, 2012, 37, 17837-17843.
[41] T. Shu, S. J. Liao, C. T. Hsieh, A. K. Roy, Y. Y. Liu, D. Y. Tzou, W. Y. Chen, Electrochim. Acta, 2012, 75, 101-107.
[42] C. T. Hsieh, H. T. Hsiao, D. Y. Tzou, P. Y. Yu, P. Y. Chen, B. S. Jang, Mater. Chem. Phys., 2015, 149-150, 359-367.
[43] A. A. Dameron, S. Pylypenko, J. B. Bult, K. C. Neyerlin, C. Engtrakul, C. Bochert, G. J. Leong, S. L. Frisco, L. Simpson, H. N. Dinh, B. Pivovar, Appl. Surf. Sci., 2012, 258, 5212-5221.
[44] J. Li, B. Zhang, Y. Chen, J. Zhang, H. Yang, J. Zhang, X. Lu, G. Li, Y. Qin, Catal. Sci. Technol., 2015, 5, 4218-4223.
[45] A. M. Lubers, C. L. Muhich, K. M. Anderson, A. W. Weimer, J. Nanopart. Res., 2015, 17, 1-16.
[46] T. Holme, Y. Zhou, R. Pasquarelli, R. O'Hayre, Phys. Chem. Chem. Phys., 2010, 12, 9461-9468.
[47] H. Yang, B. Zhang, B. Zhang, Z. Gao, Y. Qin, Chin. J. Catal., 2018, 39, 1038-1043.
[48] S. Stambula, N. Gauquelin, M. Bugnet, S. Gorantla, S. Turner, S. Sun, J. Liu, G. Zhang, X. Sun, G. A. Botton, J. Phys. Chem. C, 2014, 118, 3890-3900.
[49] X. Liu, M. H. Liu, Y. C. Luo, C. Y. Mou, S. D. Lin, H. Cheng, J. M. Chen, J. F. Lee, T. S. Lin, J. Am. Chem. Soc., 2012, 134, 10251-10258.
[50] C. J. Pan, M. C. Tsai, W. N. Su, J. Rick, N. G. Akalework, A. K. Agegnehu, S. Y. Cheng, B. J. Hwang, J. Taiwan Inst. Chem. Eng., 2017, 74, 154-186.
[51] Y. Shao-Horn, W. C. Sheng, S. Chen, P. J. Ferreira, E. F. Holby, D. Morgan, Top. Catal., 2007, 46, 285-305.
[52] S. Saha, B. Martin, B. Leonard, D. Li, J. Mater. Chem. A, 2016, 4, 9253-9265.
[53] P. Nayak, Q. Jiang, N. Kurra, X. Wang, U. Buttner, H. N. Alshareef, J. Mater. Chem. A, 2017, 5, 20422-20427.
[54] J. Zhang, C. Chen, S. Chen, Q. Hu, Z. Gao, Y. Li, Y. Qin, Catal. Sci. Technol., 2017, 7, 322-329.
[55] H. B. R. Lee, S. F. Bent, Chem. Mater., 2015, 27, 6802-6809.
[56] H. Zhang, C. Cheng, J. Mater. Chem. A, 2016, 4, 15961-15967.
[57] S. Pulinthanathu Sree, J. Dendooven, L. Geerts, R. K. Ramachandran, E. Javon, F. Ceyssens, E. Breynaert, C. E. A. Kirschhock, R. Puers, T. Altantzis, G. Van Tendeloo, S. Bals, C. Detavernier, J. A. Martens, J. Mater. Chem. A, 2017, 5, 19007-19016.
[58] H. Feng, J. Lu, P. C. Stair, J. W. Elam, Catal. Lett., 2011, 141, 512-517.
[59] J. Lu, B. Fu, M. C. Kung, G. Xiao, J. W. Elam, H. H. Kung, P. C. Stair, Science, 2012, 335, 1205-1208.
[60] C. Marichy, G. Ercolano, G. Caputo, M. G. Willinger, D. Jones, J. Rozière, N. Pinna, S. Cavaliere, J. Mater. Chem. A, 2016, 4, 969-975.
[61] W. Ren, H. Zhang, C. Cheng, Electrochim. Acta, 2017, 241, 316-322.
[62] S. Saha, J. A. Cabrera Rodas, S. Tan, D. Li, J. Power Sources, 2018, 378, 742-749.
[63] F. Gao, D. W. Goodman, Chem. Soc. Rev., 2012, 41, 8009-8020.
[64] F. Maroun, F. Ozanam, O. M. Magnussen, R. J. Behm, Science, 2001, 293, 1811-1814.
[65] O. A. Petrii, J. Solid State Electrochem., 2008, 12, 609-642.
[66] P. Mani, R. Srivastava, P. Strasser, J. Power Sources, 2011, 196, 666-673.
[67] B. Y. Xia, H. B. Wu, N. Li, Y. Yan, X. W. Lou, X. Wang, Angew. Chem. Int. Ed., 2015, 54, 3797-3801.
[68] S. Duan, R. Wang, Prog. Nat. Sci.:Mater. Int., 2013, 23, 113-126.
[69] R. K. Ramachandran, J. Dendooven, M. Filez, V. V. Galvita, H. Poelman, E. Solano, M. M. Minjauw, K. Devloo-Casier, E. Fonda, D. Hermida-Merino, W. Bras, G.B. Marin, C. Detavernier, ACS Nano, 2016, 10, 8770-8777.
[70] S. T. Christensen, H. Feng, J. L. Libera, N. Guo, J. T. Miller, P. C. Stair, J. W. Elam, Nano Lett., 2010, 10, 3047-3051.
[71] A. C. Johansson, R. B. Yang, K. B. Haugshøj, J. V. Larsen, L. H. Christensen, E. V. Thomsen, Int. J. Hydrogen Energy, 2013, 38, 11406-11414.
[72] R. K. Ramachandran, M. Filez, J. Dendooven, V. V. Galvita, H. Poelman, E. Solano, E. Fonda, G. B. Marin, C. Detavernier, RSC Adv., 2017, 7, 20201-20205.
[73] H. Wang, C. Wang, H. Yan, H. Yi, J. Lu, J. Catal., 2015, 324, 59-68.
[74] A. S. Aarnio, E. Sairanen, R. M. Arán-Ais, M. C. Figueiredo, J. Hua, J. M. Feliu, J. Lehtonen, R. Karinen, T. Kallio, J. Catal., 2014, 309, 38-48.
[75] S. T. Christensen, J. W. Elam, Chem. Mater., 2010, 22, 2517-2525.
[76] D. Wang, H. L. Xin, R. Hovden, H. Wang, Y. Yu, D. A. Muller, F. J. Di Salvo, H. D. Abruna, Nat. Mater., 2013, 12, 81-87.
[77] D. Kaplan, M. Alon, L. Burstein, Y. Rosenberg, E. Peled, J. Power Sources, 2011, 196, 1078-1083.
[78] X. Wang, Y. Orikasa, Y. Takesue, H. Inoue, M. Nakamura, T. Minato, N. Hoshi, Y. Uchimoto, J. Am. Chem. Soc., 2013, 135, 5938-5941.
[79] S. Xie, S.I. Choi, N. Lu, L. T. Roling, J.A. Herron, L. Zhang, J. Park, J. Wang, M. J. Kim, Z. Xie, M. Mavrikakis, Y. Xia, Nano Lett., 2014, 14, 3570-3576.
[80] H. Yang, Angew. Chem. Int. Ed., 2011, 50, 2674-2676.
[81] M. J. Weber, A. J. M. Mackus, M. A. Verheijen, C. van der Marel, W. M. M. Kessels, Chem. Mater., 2012, 24, 2973-2977.
[82] J. Lu, K. B. Low, Y. Lei, J. A. Libera, A. Nicholls, P. C. Stair, J. W. Elam, Nat. Commun., 2014, 5, 4264.
[83] K. Cao, Q. Zhu, B. Shan, R. Chen, Sci. Rep., 2015, 5, 8470.
[84] Y. C. Wang, Y. J. Lai, L. Song, Z. Y. Zhou, J. G. Liu, Q. Wang, X. D. Yang, C. Chen, W. Shi, Y. P. Zheng, M. Rauf, S. G. Sun, Angew. Chem. Int. Ed., 2015, 54, 9907-9910.
[85] Y. Y. Ma, C. X. Wu, X. J. Feng, H. Q. Tan, L. K. Yan, Y. Liu, Z. H. Kang, E. B. Wang, Y. G. Li, Energy Environ. Sci., 2017, 10, 788-798.
[86] R. Miao, B. Dutta, S. Sahoo, J. He, W. Zhong, S. A. Cetegen, T. Jiang, S. P. Alpay, S. L. Suib, J. Am. Chem. Soc., 2017, 139, 13604-13607.
[87] P. Chen, T. Zhou, L. Xing, K. Xu, Y. Tong, H. Xie, L. Zhang, W. Yan, W. Chu, C. Wu, Y. Xie, Angew. Chem. Int. Ed., 2017, 56, 610-614.
[88] S. H. Nam, Y. S. Kim, H. S. Shim, S. M. Choi, H. J. Kim, W. B. Kim, J. Nanosci. Nanotechnol., 2008, 8, 5427-5432.
[89] P. Lin, Q. She, B. Hong, X. J. Liu, Y. Shi, Z. Shi, M. Zheng, Q. Dong, J. Electrochem. Soc., 2010, 157, A818-A823.
[90] X. Tong, Y. Qin, X. Guo, O. Moutanabbir, X. Ao, E. Pippel, L. Zhang, M. Knez, Small, 2012, 8, 3390-3395.
[91] K. L. Pickrahn, S. W. Park, Y. Gorlin, H. B. R. Lee, T. F. Jaramillo, S. F. Bent, Adv. Energy Mater., 2012, 2, 1269-1277.
[92] C. Y. Su, B. H. Liu, T. J. Lin, Y. M. Chi, C. C. Kei, K. W. Wang, T. P. Perng, J. Mater. Chem. A, 2015, 3, 18983-18990.
[93] H. Li, Z. Guo, X. Wang, J. Mater. Chem. A, 2017, 5, 21353-21361.
[94] Z. Guo, X. Wang, Angew. Chem. Int. Ed., 2018, 57, 5898-5920.
[95] H. Li, Y. Shao, Y. Su, Y. Gao, X. Wang, Chem. Mater., 2016, 28, 1155-1164.
[96] T. A. Ho, C. Bae, H. Nam, E. Kim, S. Y. Lee, J. H. Park, H. Shin, ACS Appl. Mater. Interfaces, 2018, 10, 12807-12815.
[97] Y. Cimen, A. W. Peters, J. R. Avila, W. L. Hoffeditz, S. Goswami, O. K. Farha, J. T. Hupp, Langmuir, 2016, 32, 12005-12012.
[98] W. Xiong, Z. Guo, H. Li, R. Zhao, X. Wang, ACS Energy Lett., 2017, 2, 2778-2785.
[99] Y. Kim, D. H. K. Jackson, D. Lee, M. Choi, T. W. Kim, S. Y. Jeong, H. J. Chae, H. W. Kim, N. Park, H. Chang, T. F. Kuech, H. J. Kim, Adv. Funct. Mater., 2017, 27, 1701825.
[100] S. Oh, J. B. Kim, J. T. Song, J. Oh, S. H. Kim, J. Mater. Chem A, 2017, 5, 3304-3310.
[101] Y. Gogotsi, Nat. Mater., 2015, 14, 1079-1080.
[102] B. Anasori, M. R. Lukatskaya, Y. Gogotsi, Nat. Rev. Mater., 2017, 2, 16098.
[103] H. H. Hwu, J. G. Chen, Chem. Rev., 2005, 105, 185-212.
[104] M. Sarr, N. Bahlawane, D. Arl, M. Dossot, E. McRae, D. Lenoble, J. Phys. Chem. C, 2014, 118, 23385-23392.
[105] M. Sarr, N. Bahlawane, D. Arl, M. Dossot, E. McRae, D. Lenoble, Appl. Surf. Sci., 2016, 379, 523-529.
[106] J. Moon, H. J. Ahn, Y. Seo, T. I. Lee, C. K. Kim, I. C. Rho, C. H. Kim, W. S. Hwang, B. J. Cho, IEEE Trans. Electron Devices, 2016, 63, 1423-1427.
[107] A. Bertuch, B. D. Keller, N. Ferralis, J. C. Grossman, G. Sundaram, J. Vac. Sci. Technol. A, 2017, 35, 01B141.
[108] W. Xiong, Q. Guo, Z. Guo, H. Li, R. Zhao, Q. Chen, Z. Liu, X. Wang, J. Mater. Chem. A, 2018, 6, 4297-4304.
[109] M. Wang, Z. Gao, B. Zhang, H. Yang, Y. Qiao, S. Chen, H. Ge, J. Zhang, Y. Qin, Chem.-Eur. J., 2016, 22, 8438-8443.
[110] Z. Gao, M. Dong, G. Wang, P. Sheng, Z. Wu, H. Yang, B. Zhang, G. Wang, J. Wang, Y. Qin, Angew. Chem. Int. Ed., 2015, 54, 9006-9010.