催化学报 ›› 2007, Vol. 28 ›› Issue (9): 755-757.

• 研究快讯 • 上一篇    下一篇

聚砜上催化剂增强化学气相沉积钯-铂双层纳米膜

郑建华1,周锦兰2,田熙科1,冯文芳2,俞开潮2   

  1. 1 中国地质大学材料科学与化学工程学院, 湖北武汉 430074; 2 华中科技大学化学与化工系材料化学与服役失效湖北省重点实验室, 湖北武汉 430074
  • 收稿日期:2007-09-25 出版日期:2007-09-25 发布日期:2011-09-28

Catalyst-Enhanced Chemical Vapor Deposition of Palladium-Platinum Bilayer Nano-Films on Polysulfone

ZHENG Jianhua1, ZHOU Jinlan2, TIAN Xike1, FENG Wenfang2, YU Kaichao2*   

  1. 1 Department of Material Science and Chemical Engineering, China University of Geosciences, Wuhan 430074, Hubei, China;2 Hubei Key Laboratory of Materials Chemistry and Service Failure, Department of Chemistry and Chemical Engineering,Huazhong University of Science and Technology, Wuhan 430074, Hubei, China
  • Received:2007-09-25 Online:2007-09-25 Published:2011-09-28

摘要: 以N2和O2作载气,采用催化剂增强化学气相沉积法在聚砜上获得了Pt和Pd-Pt双层金属纳米薄膜. 当使用Pd(hfac)2和Pt(COD)Me2为前驱体在同一反应器内共沉积时,只有Pt被沉积,铂和钯顺序沉积可以得到双层膜. 聚砜上金属钯和铂微粒尺度为15~30 nm, 双层膜厚度为120~180 nm.

关键词: 催化剂增强化学气相沉积, 聚砜, 铂膜, 钯-铂双层膜

Abstract: Catalyst-enhanced chemical vapour deposition of Pt and Pd-Pt bilayer films on polysulfone using N2 and O2 as the carrier gas was investigated. Only Pt was deposited when the mixture of complexes Pt(COD)Me2 and Pd(hfac)2 was used as precursors in the same chamber. Sequential deposition of two metals formed Pd-Pt bilayer films. The particle size of Pd and Pt on polysulfone is 15-30 nm, and the thickness of the bilayer is 120-180 nm.

Key words: catalyst-enhanced chemical vapor deposition, polysulfone, platinum film, palladium-platinum bilayer film