催化学报

催化学报 ›› 2009, Vol. 30 ›› Issue (12): 1227-1232.

• 研究论文 • 上一篇    下一篇

用化学镀法制备 Pd/Ag 膜时膜厚和组成的控制

曾高峰1,2, 史蕾1,2, 徐恒泳1   

  1. 1 中国科学院大连化学物理研究所, 辽宁大连116023 2 中国科学院研究生院, 北京100049
  • 收稿日期:2009-12-25 出版日期:2009-12-25 发布日期:2013-09-29

Control of Thickness and Composition of Pd/Ag Membrane during Layer-by-Layer Electroless Plating

ZENG Gaofeng1,2, SHI Lei1,2, XU Hengyong1,*   

  1. 1Dalian Institute of Chemical Physics, Chinese Academy of Sciences, Dalian 116023, Liaoning, China 2Graduate University of Chinese Academy of Sciences, Beijing 100049, China
  • Received:2009-12-25 Online:2009-12-25 Published:2013-09-29

PDF

1131

被引次数

14

摘要： 研究了不同 Pd2+含量的镀液在多孔陶瓷载体上的化学沉积规律, 发现当 Pd 沉积层厚度达到约 5 μm 后, 即使镀液中反应物的消耗比例很小, 膜厚增长也明显变缓, 沉积反应主要受膜层表面的催化活性位控制; 当镀液中 Pd2+含量只能沉积形成小于 4 μm 的 Pd 膜时, 在 323 K 化学镀 180 min 后, 镀液中 Pd2+的转化率高于 90%. 与之相似, 当 Ag 镀液中的 Ag+含量等于 0.5~2 μm 的 Ag 膜层所需量时, 在 333 K 化学镀 120 min 后, Ag+的转化率可达 95%. Ag+的高转化率与 Ag 颗粒的择向生长特性有关. 根据 Pd 和 Ag 的化学镀沉积规律, 通过调节镀液中金属离子的含量能够预先设计和精确控制超薄 Pd/Ag 膜的膜厚和组成.

关键词: 钯, 银, 复合膜, 化学镀, 膜厚控制, 组成控制, 沉积规律

Abstract: The deposition rules of Pd were investigated during electroless plating in baths with different amounts of Pd2+. It was demonstrated that the Pd deposition rate was controlled by the auto-catalytic activity of the metal layer surface when the deposited Pd layer became thicker than 5 μm even if Pd2+ in the plating baths was far from being consumed. When the Pd2+ amount in the bath was kept lower than that necessary for reaching the Pd layer thickness (e.g. corresponding to 1–4 μm Pd), the Pd2+ conversion in the bath was higher than 90% after reaction for 180 min. Furthermore, the same was found during Ag deposition from silver plating baths with a low amount of Ag+, i.e. Ag+ conversion was higher than 95% after plating for 120 min in baths containing Ag+ sufficient for thick Ag layer of 0.5–2 μm. It was proved by scanning electron microscopy measurements that the higher conversions of Ag+ were related to the special growth properties of Ag particles. According to the deposition rules of Pd and Ag, the thickness and metal composition of ultra-thin Pd/Ag membranes prepared by layer-by-layer electroless plating could be pre-designed as well as accurately controlled by preparing relevant plating bath with low amounts of metal.

Key words: palladium, silver, composite membrane, electroless plating, control of membrane thickness, control of metal composition, deposition rule